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Electrodeposited anisotropic NiFe 45/55 thin films for high-frequency micro-inductor applications
- Source :
-
Journal of Magnetism & Magnetic Materials . May2010, Vol. 322 Issue 9-12, p1690-1693. 4p. - Publication Year :
- 2010
-
Abstract
- Abstract: Micro-inductors, with an electrodeposited nickel–iron core have been fabricated on silicon substrates, and have been characterized in the frequency range up to 100MHz. The core consists of a nickel iron, 45:55 alloy which is deposited using pulse-reverse electroplating in the presence of a magnetic field to control anisotropy. The operation of the inductors with low loss at high-frequency critically depends on core thickness, which is used to control eddy-current loss as the frequency is increased. However, it is shown that the permeability of NiFe 45/55 has a dependency on thickness, and decreases with increasing thickness. For example, the permeability is measured to be approximately 1000 for a 1-μm-thick film, decreasing to approximately 400 for a 5-μm-thick film. In order to correctly design micro-inductors for operation up to 100MHz, it is important that this characteristic of the material is taken into account. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 03048853
- Volume :
- 322
- Issue :
- 9-12
- Database :
- Academic Search Index
- Journal :
- Journal of Magnetism & Magnetic Materials
- Publication Type :
- Academic Journal
- Accession number :
- 48816583
- Full Text :
- https://doi.org/10.1016/j.jmmm.2009.01.038