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Determination of the linear attenuation range of electron transmission through film specimens
- Source :
-
Micron . Oct2010, Vol. 41 Issue 7, p769-774. 6p. - Publication Year :
- 2010
-
Abstract
- Abstract: We have investigated the linear attenuation range of electron transmission through film specimens and its dependence on the electron energy, the acceptance half-angle of a detector or an objective aperture, and specimen properties, in the scanning transmission electron microscope (STEM) and the conventional transmission electron microscope (TEM). Electron transmission in the bright-field mode was calculated by the Monte Carlo simulation of electron scattering, and its range of the linear attenuation in film thickness was then determined by a linear least squares fit. The corresponding linear thickness range was shown to increase with the electron energy and the acceptance half-angle, although it decreased with the increase in the atomic number of specimen materials. Under the condition of a 300kV STEM or a 3MV ultra-high voltage electron microscope (ultra-HVEM), the linear attenuation range could extend to several microns for light specimen materials, and this was validated by experimental data in the ultra-HVEM. The presented results can be helpful for accurately measuring the specimen thickness or mass from electron transmission, and estimating the deviation of electron transmission from linearity when tilting a specimen in electron tomography. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09684328
- Volume :
- 41
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Micron
- Publication Type :
- Academic Journal
- Accession number :
- 53303768
- Full Text :
- https://doi.org/10.1016/j.micron.2010.05.014