Back to Search
Start Over
Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications.
- Source :
-
Applied Physics Letters . 8/23/2010, Vol. 97 Issue 8, p083501. 3p. 1 Illustration, 3 Charts, 2 Graphs. - Publication Year :
- 2010
-
Abstract
- In this letter, temperature compensation for aluminum nitride (AlN) Lamb wave resonators operating at high temperature is presented. By adding a compensating layer of silicon dioxide (SiO2), the turnover temperature can be designed for high temperature operation by varying the normalized AlN film thickness (hAlN/λ) and the normalized SiO2 film thickness (hSiO2/λ). With different designs of hAlN/λ and hSiO2/λ, the Lamb wave resonators were well temperature-compensated at 214 °C, 430 °C, and 542 °C, respectively. The experimental results demonstrate that the thermally compensated AlN Lamb wave resonators are promising for frequency control and sensing applications at high temperature. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 97
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 53421589
- Full Text :
- https://doi.org/10.1063/1.3481361