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Monocliniclike local atomic structure in amorphous ZrO2 thin film.
- Source :
-
Applied Physics Letters . 10/4/2010, Vol. 97 Issue 14, p141905. 3p. - Publication Year :
- 2010
-
Abstract
- The local atomic structure and electronic structure of amorphous ZrO2 (a-ZrO2) thin film were examined using the Zr K- and O K-edge x-ray absorption spectroscopy and x-ray photoelectron spectroscopy. It was found that a monoclinic local structure is stabilized in several nanometers-thick a-ZrO2 films due to the structural disorder. The distinct local structure in a-ZrO2 from the ordinary tetragonal ZrO2 (t-ZrO2) films results in different electronic structure with a decrease in the band gap by 0.5 eV. The reduced band gap and dielectric constant of a-ZrO2 suggest inferior gate leakage current performances compared to the t-ZrO2 films. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 97
- Issue :
- 14
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 54326485
- Full Text :
- https://doi.org/10.1063/1.3497077