Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition.

The growth of vertically aligned carbon nanotubes using a direct current plasma enhanced chemical vapor deposition system is reported. The growth properties are studied as a function of the Ni catalyst layer thickness, bias voltage, deposition temperature, C[sub 2]H[sub 2]:NH[sub 3] ratio, and pressure. It was found that the diameter, growth rate, and areal density of the nanotubes are controlled by the initial thickness of the catalyst layer. The alignment of the nanotubes depends on the electric field. Our results indicate that the growth occurs by diffusion of carbon through the Ni catalyst particle, which rides on the top of the growing tube. © 2001 American Institute of Physics. [ABSTRACT FROM AUTHOR]