Experimental investigation of soft x-ray diffraction.

The experimental study on soft x-ray diffraction using gold test objects has been carried out with synchrotron radiation at NSRL. Some images, which correspond to 0, 2 and 80 mm away from a specimen, were recorded as relief pattern on photoresist with use of 3.2nm x-rays from U12A bemtine. The experimental result shows that patterns vary with the distance between specimen and photoresist detector, which is in excellent agreement with the theoretical one. [ABSTRACT FROM AUTHOR]