Cite
Influence of composition and bottom electrode properties on the local conductivity of TiN/HfTiO2 and TiN/Ru/HfTiO2 stacks.
MLA
Martin, Dominik, et al. “Influence of Composition and Bottom Electrode Properties on the Local Conductivity of TiN/HfTiO2 and TiN/Ru/HfTiO2 Stacks.” Applied Physics Letters, vol. 98, no. 1, Jan. 2011, p. 012901. EBSCOhost, https://doi.org/10.1063/1.3533802.
APA
Martin, D., Grube, M., Reinig, P., Oberbeck, L., Heitmann, J., Weber, W. M., Mikolajick, T., & Riechert, H. (2011). Influence of composition and bottom electrode properties on the local conductivity of TiN/HfTiO2 and TiN/Ru/HfTiO2 stacks. Applied Physics Letters, 98(1), 012901. https://doi.org/10.1063/1.3533802
Chicago
Martin, Dominik, Matthias Grube, Peter Reinig, Lars Oberbeck, Johannes Heitmann, Walter M. Weber, Thomas Mikolajick, and Henning Riechert. 2011. “Influence of Composition and Bottom Electrode Properties on the Local Conductivity of TiN/HfTiO2 and TiN/Ru/HfTiO2 Stacks.” Applied Physics Letters 98 (1): 012901. doi:10.1063/1.3533802.