Miniature orthogonal optical scanning mirror excited by torsional piezoelectric fiber actuator

Abstract: A novel optical scanner excited by a torsional piezoelectric fiber actuator is presented. The device consists of a piezoelectric fiber actuator generating torsional and longitudinal vibrations simultaneously and a specially designed metal frame transforming the two vibrations to orthogonal deflections of the mirror. Theoretical and experimental studies were performed on the structure. The changing trends of the vibration modes and resonant frequencies were obtained from finite element simulations. Samples with 1mm×1mm mirrors were fabricated from PZT hollow fibers with a diameter of 1mm and a stainless steel sheet with a thickness of 50μm. A horizontal scanning angle of 17.9° and a vertical scanning angle of 2.6° were achieved at 6780 and 10,330Hz under an applied voltage of 400Vp–p. [Copyright &y& Elsevier]