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Folded Gate LDMOS Transistor With Low-On-Resistance and High Transconductance.

Authors :
Yuanzheng Zhu
Liang, Yung C.
Shuming Xu
Pang-Dow Foo
Sin, Johnny K.O.
Source :
IEEE Transactions on Electron Devices. Dec2001, Vol. 48 Issue 12, p2917. 12p. 6 Diagrams, 4 Charts, 14 Graphs.
Publication Year :
2001

Abstract

Presents a study that proposed a novel folded gate LD metal oxide semiconductor transistor (FG-LDMOST) with the properties of low-on resistance and high transconductance. Information on how the FG structure was formed; Investigation of the FG concept; Fabrication of FG-LDNOS on 4-5 &Ω; cm n-type <100> lightly doped substrate using complementary metal oxide semiconductor (CMOS) compatible process technology.

Details

Language :
English
ISSN :
00189383
Volume :
48
Issue :
12
Database :
Academic Search Index
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
6001422
Full Text :
https://doi.org/10.1109/16.974729