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Characteristics of trenched coplanar waveguide for high-resistivity Si MMIC applications.
- Source :
-
IEEE Transactions on Microwave Theory & Techniques . May98 Part 2 of 2, Vol. 46 Issue 5, p623. 9p. 8 Black and White Photographs, 1 Diagram, 2 Charts, 14 Graphs. - Publication Year :
- 1998
-
Abstract
- Investigates a low radio frequency trenched coplanar waveguide (CPW) transmission-line structure with the use of evaporated aluminum tracks on a high-resistivity silicon. Reasons for the method use; What experimental results showed; How the proposed waveguide structure may be utilized in a specific fabricated process.
- Subjects :
- *RADIO frequency
Subjects
Details
- Language :
- English
- ISSN :
- 00189480
- Volume :
- 46
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Microwave Theory & Techniques
- Publication Type :
- Academic Journal
- Accession number :
- 607758
- Full Text :
- https://doi.org/10.1109/22.668674