Analysis and design of a high performance and low cost bio-mass sensor based on the radial contour mode disk resonator

Abstract: A high performance and cost effective biosensor is designed based on a radial contour-mode disk resonator. Filling a dielectric material within the capacitive gap, we can achieve low motional resistance (Rx ) in a cost-effective manner. The motional resistance of the new device is characterized analytically and validated using 3D-multiphysics simulation. Compared with other biosensors, the introduced biosensor may detect the smaller mass changes with mass sensitivity of −74.68μm2/ng (−1617Hz/ng). [Copyright &y& Elsevier]