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Low-frequency noise properties of selectively dry etched...
- Source :
-
IEEE Transactions on Electron Devices . Jun98, Vol. 45 Issue 6, p1219. 7p. 5 Black and White Photographs, 9 Graphs. - Publication Year :
- 1998
-
Abstract
- Provides information on a study in which the low-frequency noise of lattice-matched indium-phosphorus (InP) high electron mobility transistors (HEMT) gate recess, etched with a highly selective dry etching process and with conventional wet etching, were studied. Introduction on the development of HEMT; Examination of the drain and gate current noise under all bias conditions and temperatures; Conclusions.
- Subjects :
- *MODULATION-doped field-effect transistors
*PLASMA etching
Subjects
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 45
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 631772
- Full Text :
- https://doi.org/10.1109/16.678520