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Low-frequency noise properties of selectively dry etched...

Authors :
Duran, Halit C.
Ren, Lin
Beck, Mattias
Py, Marcel A.
Ilegems, Marc
Bächtold, Werner
Source :
IEEE Transactions on Electron Devices. Jun98, Vol. 45 Issue 6, p1219. 7p. 5 Black and White Photographs, 9 Graphs.
Publication Year :
1998

Abstract

Provides information on a study in which the low-frequency noise of lattice-matched indium-phosphorus (InP) high electron mobility transistors (HEMT) gate recess, etched with a highly selective dry etching process and with conventional wet etching, were studied. Introduction on the development of HEMT; Examination of the drain and gate current noise under all bias conditions and temperatures; Conclusions.

Details

Language :
English
ISSN :
00189383
Volume :
45
Issue :
6
Database :
Academic Search Index
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
631772
Full Text :
https://doi.org/10.1109/16.678520