Back to Search
Start Over
Impedance-Based Force Transduction Within Fluid-Filled Parylene Microstructures.
- Source :
-
Journal of Microelectromechanical Systems . Oct2011, Vol. 20 Issue 5, p1098-1108. 11p. - Publication Year :
- 2011
-
Abstract
- We report on the use of electrochemical impedance (EI) as the basis for force transduction in Parylene-based microdevices. Electrolyte-filled microstructures were realized for extremely sensitive contact-force detection (10 mN range, \pm0.023 mN resolution) enabled by EI-based transduction and are a promising platform for next-generation biomedical sensing technology. The design, fabrication, and characterization of Parylene-based electrochemical-MEMS (EC-MEMS) devices capable of microNewton contact-mode force measurement are presented and discussed.\hfill[2011-0040] [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 20
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 66421210
- Full Text :
- https://doi.org/10.1109/JMEMS.2011.2160935