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Ignition of a Microcavity Plasma Array.
- Source :
-
IEEE Transactions on Plasma Science . Nov2011 Part 1 Part 1, Vol. 39 Issue 11, p2684-2685. 2p. - Publication Year :
- 2011
-
Abstract
- Microcavity plasma arrays are regular arrays of inverse pyramidal cavities created on positively doped silicon wafers. Each cavity acts as a microscopic dielectric barrier discharge. It has an opening of 50\ \mu\m \times 50\ \mu\m and a depth of 45 \mu\m. The separation of the cavities is 50 \mu\m. Operated at atmospheric pressure in argon and excited with a 100-kHz RF voltage, each cavity develops a localized microplasma. Experiments show a strong interaction of the individual cavities, leading, for example, to the propagation of ionization waves along the array surface. This paper studies the ignition of a microcavity plasma array by means of a numerical simulation. The propagation of an ionization wave is observed. Its propagation speed matches experimental findings. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00933813
- Volume :
- 39
- Issue :
- 11
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Plasma Science
- Publication Type :
- Academic Journal
- Accession number :
- 67086362
- Full Text :
- https://doi.org/10.1109/TPS.2011.2128350