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The Effects of Grain Boundaries in the Electrical Characteristics of Large Grain Polycrystalline Thin-Film Transistors.

Authors :
Chan, Victor W. C.
Chan, Philip C. H.
Yin, Chunshan
Source :
IEEE Transactions on Electron Devices. Aug2002, Vol. 49 Issue 8, p1384. 7p. 3 Black and White Photographs, 1 Diagram, 10 Graphs.
Publication Year :
2002

Abstract

Provides information on a study which fabricated thin-film transistors using the nickel-seeded metal-induced lateral crystallization (MILC) technique. Overview of the nickel-seeded MILC; Device fabrication process; Experimental results and discussion; Design guideline to reduce the grain boundary effect.

Details

Language :
English
ISSN :
00189383
Volume :
49
Issue :
8
Database :
Academic Search Index
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
7107653
Full Text :
https://doi.org/10.1109/TED.2002.801302