Effects of rf bias on the superconducting and structural properties of rf magnetron sputtered NbN.

Authors :: Carter, W. L.
Cukauskas, E. J.
Qadri, S. B.
Lewis, A. S.
Mattauch, R. J.
Source :: Journal of Applied Physics. 4/15/1986, Vol. 59 Issue 8, p2905. 3p. 3 Graphs.
Publication Year :: 1986
Abstract: Investigates the superconducting and structure properties of rf magnetron sputtered niobium nitride (NbN) films prepared at eleveted temperatures as a function of rf substrate bias. Effect of substrate bias on low-temperature resistivity; Details on the preparation of NbN films; Measurements of superconducting temperatures.

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