Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet.

Authors :: Slaughter, J. M.
Schulze, Dean W.
Hills, C. R.
Mirone, A.
Stalio, R.
Watts, R. N.
Tarrio, C.
Lucatorto, T. B.
Krumrey, M.
Mueller, P.
Falco, Charles M.
Source :: Journal of Applied Physics. 8/15/1994, Vol. 76 Issue 4, p2144. 13p. 3 Black and White Photographs, 8 Charts, 14 Graphs.
Publication Year :: 1994
Abstract: Presents a study which detailed the results of structural, chemical, and extreme ultraviolet characterization of Si/Mo multilayers grown by sputtering and by UHV evaporation. Reason for the variation in the deposition conditions; Techniques used; Function of wavelength.

Full Text Access

Tools