Metalorganic chemical vapor deposition of BaTiO3 thin films.

Authors :: Kwak, B. S.
Zhang, K.
Boyd, E. P.
Erbil, A.
Wilkens, B. J.
Source :: Journal of Applied Physics. 1/15/1991, Vol. 69 Issue 2, p767. 6p. 2 Black and White Photographs, 1 Diagram, 6 Graphs.
Publication Year :: 1991
Abstract: Considers the effects of growth parameters and substrate type on the characteristics of the metalorganic chemical vapor deposition-grown barium titanate thin films. Method used to study the surface and the cross-sectional morphology of the films; Surface morphology and microstructure of the thin films; Substrate effect on the thin film growth.