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Observation of natural oxide growth on silicon facets using an atomic force microscope with current measurement.
- Source :
-
Journal of Applied Physics . 7/15/1992, Vol. 72 Issue 2, p688. 4p. 2 Black and White Photographs, 2 Graphs. - Publication Year :
- 1992
-
Abstract
- Presents a study which investigated natural oxide growth on silicon facets using an atomic force microscope with current measurement. Experimental details; Results and discussion; Conclusion.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 72
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7632235
- Full Text :
- https://doi.org/10.1063/1.351854