Electrical characterization of ZnSe epitaxial layer reactive-ion-etched by a gas mixture of ethane and hydrogen.

Investigates the characterization of zinc selenide (ZnSe) epitaxial layer reactive-ion-etched by a gas mixture of ethane and hydrogen. Measurement of the sheet resistance of ZnSe epitaxial layers; Details on the estimated electrically active thicknesses; Importance of reactive ion etching for the fabrication of compound semiconductor devices.