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An ellipsometry study of a hydrogenated amorphous silicon based n-i structure.

Authors :
Collins, R. W.
Clark, A. H.
Guha, S.
Huang, C.-Y.
Source :
Journal of Applied Physics. 5/15/1985, Vol. 57 Issue 10, p4566. 6p. 2 Charts, 5 Graphs.
Publication Year :
1985

Abstract

Analyzes the structure of a hydrogenated amorphous silicon based n-1 two-layer system using spectroscopic ellipsometry measurements. Details on the experiment; Data analysis; Results of the study.

Subjects

Subjects :
*SILICON
*SPECTRUM analysis
*ELLIPSOMETRY

Details

Language :
English
ISSN :
00218979
Volume :
57
Issue :
10
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7634282
Full Text :
https://doi.org/10.1063/1.335361
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