Real time spectroscopic ellipsometry characterization of the nucleation of diamond by filament-assisted chemical vapor deposition.

Reports on the application of real time spectroscopic ellipsometry to characterize the nucleation of diamond on c-silicon by tungsten filament-assisted chemical vapor deposition (CVD). Stages of diamond growth by filament-assisted CVD; Preparation of the diamond; Information on the structural model and parameters deduced in a linear regression analysis of the final spectra.