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Evaluation of insulating property by secondary ion mass spectrometry.
- Source :
-
Journal of Applied Physics . 10/15/1987, Vol. 62 Issue 8, p3343. 3p. - Publication Year :
- 1987
-
Abstract
- Presents a study that measured the time dependence of the secondary ion intensity in secondary ion mass spectroscopy analysis of insulating films. Schematic diagram of the process on the reduction of surface charging and its equivalent circuits; Relation between the ion intensity suppression ratio and the film thickness.
- Subjects :
- *SPECTRUM analysis
*INSULATING materials
*ELECTRONIC circuits
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 62
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7637398
- Full Text :
- https://doi.org/10.1063/1.339295