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Ion-beam direct-write mechanisms in palladium acetate films.

Authors :
Gross, M. E.
Brown, W. L.
Harriott, L. R.
Cummings, K. D.
Linnros, J.
Funsten, H.
Source :
Journal of Applied Physics. 8/1/1989, Vol. 66 Issue 3, p1403. 8p.
Publication Year :
1989

Abstract

Presents information on a study which fabricated palladium (Pd) features by high-energy ion irradiation of thin Pd acetate films. Information on spin coating a Pd acetate; Structure of Pd acetate; Illustration of the fluence dependence of the infrared spectrum; Monitoring of gas evolution.

Subjects

Subjects :
*PALLADIUM
*IRRADIATION
*ACETATES
*THIN films

Details

Language :
English
ISSN :
00218979
Volume :
66
Issue :
3
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7641576
Full Text :
https://doi.org/10.1063/1.344444
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