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Reflectance difference for in situ control of surface V/III ratio during epitaxial growth of GaAs.

Authors :
Jönsson, J.
Paulsson, G.
Samuelson, L.
Source :
Journal of Applied Physics. 8/1/1991, Vol. 70 Issue 3, p1737. 5p.
Publication Year :
1991

Abstract

Presents information on a study which analyzed the results of in situ studies of the surface V/III balance using the reflectance-difference (RD) method during vacuum chemical epitaxy of (001) gallium arsenide from arsine and triethylgallium. Experimental method; Adjustment in the experimental parameters; Analysis of the RD signal when growth was effectuated at different V/III ratios.

Details

Language :
English
ISSN :
00218979
Volume :
70
Issue :
3
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7641697