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Plasma nitridation process for superconducting Nb wiring to improve their annealing stability.

Authors :
Shiota, Tetsuyoshi
Imamura, Takeshi
Hasuo, Shinya
Source :
Journal of Applied Physics. 12/1/1991, Vol. 70 Issue 11, p6958. 8p. 1 Chart, 11 Graphs.
Publication Year :
1991

Abstract

Presents a study that investigated plasma nitridation process for superconducting niobium wiring to improve their annealing stability. Method of the study; Results and discussion; Conclusion.

Subjects

Subjects :
*NIOBIUM
*NITRIDES
*SUPERCONDUCTORS
*ANNEALING of metals

Details

Language :
English
ISSN :
00218979
Volume :
70
Issue :
11
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7644576
Full Text :
https://doi.org/10.1063/1.349823
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