Properties of indium tin oxide films prepared by the electron beam evaporation method in relation to characteristics of indium tin oxide/silicon oxide/silicon junction solar cells.

Discusses indium tin oxide (ITO)/silicon oxide/silicon junction solar cells produced by depositing ITO on a thin film silicon oxide-covered single-crystal Si substrate. Use of electron-beam evaporation method; Ways to decrease the amount of the metal indium; Cause of a decrease in the lattice constant of the films.