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Structural properties of heteroepitaxial systems using hybrid multiple diffraction in Renninger scans.
- Source :
-
Journal of Applied Physics . 5/1/1993, Vol. 73 Issue 9, p4218. 9p. - Publication Year :
- 1993
-
Abstract
- Presents a study that reported a method for characterizing heteroepitaxial structures using hybrid multiple diffractions which appear in the layer Renninger scans together with the normal MD features. Renninger scan peak profile for mosaic crystals; Misorientation between layer and substrates lattices; Refractive index correction.
- Subjects :
- *OPTICAL diffraction
*EPITAXY
*SCANNING electron microscopy
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 73
- Issue :
- 9
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7649110