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Synthesis and characterization of fine grain diamond films.

Authors :
Wu, Richard L. C.
Rai, A. K.
Garscadden, Alan
Kee, Patrick
Desai, Hemant D.
Miyoshi, Kazuhisa
Source :
Journal of Applied Physics. 7/1/1992, Vol. 72 Issue 1, p110. 7p.
Publication Year :
1992

Abstract

Presents a study that developed a diamond film using microwave plasma assisted chemical vapor deposition. Use of several analytical techniques including Rutherford backscattering and Raman spectroscopy; Properties of diamonds; Discussion on diamond film deposition.

Subjects

Subjects :
*DIAMONDS
*MICROWAVE plasmas
*CHEMICAL vapor deposition
*RAMAN spectroscopy

Details

Language :
English
ISSN :
00218979
Volume :
72
Issue :
1
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7651243
Full Text :
https://doi.org/10.1063/1.352167
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