Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy.

Authors :: Tochikubo, Fumiyoshi
Makabe, Toshiaki
Kakuta, Shigeru
Suzuki, Akira
Source :: Journal of Applied Physics. 3/1/1992, Vol. 71 Issue 5, p2143. 8p. 1 Diagram, 2 Charts, 6 Graphs.
Publication Year :: 1992
Abstract: Deals with a study which investigated radio frequency glow discharges in methane and hydrogen by spatiotemporal optical emission spectroscopy. Background to the study; Experimental method; Results and discussion.

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