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Optimal epilayer thickness for InxGa1-xAs and InyAl1-yAs composition measurement by high-resolution x-ray diffraction.
- Source :
-
Journal of Applied Physics . 6/15/1993, Vol. 73 Issue 12, p8304. 5p. 5 Graphs. - Publication Year :
- 1993
-
Abstract
- Presents a study on optimal epilayer thickness for In[subx]Ga[sub1-x] and In[suby]Al[sub1-y]As compostion measurement by high-resolution x-ray diffraction. Introduction to high-resolution x-ray diffraction; Experimental design; Results and discussion.
- Subjects :
- *X-ray diffraction
*OPTICAL diffraction
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 73
- Issue :
- 12
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7653941
- Full Text :
- https://doi.org/10.1063/1.353448