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Silane thermometry in radio-frequency discharge plasma by coherent anti-Stokes Raman spectroscopy.

Authors :
Hata, Nobuhiro
Matsuda, Akihisa
Tanaka, Kazunobu
Source :
Journal of Applied Physics. 3/15/1986, Vol. 59 Issue 6, p1872. 3p. 1 Graph.
Publication Year :
1986

Abstract

Presents a study which determined the rotational temperature of silane molecules in a flowing gas as well as in a radio-frequency discharge plasma of silane. Experiment; Results; Discussion.

Details

Language :
English
ISSN :
00218979
Volume :
59
Issue :
6
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7654168
Full Text :
https://doi.org/10.1063/1.336415