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Silane thermometry in radio-frequency discharge plasma by coherent anti-Stokes Raman spectroscopy.
- Source :
-
Journal of Applied Physics . 3/15/1986, Vol. 59 Issue 6, p1872. 3p. 1 Graph. - Publication Year :
- 1986
-
Abstract
- Presents a study which determined the rotational temperature of silane molecules in a flowing gas as well as in a radio-frequency discharge plasma of silane. Experiment; Results; Discussion.
- Subjects :
- *SILANE compounds
*PLASMA gases
*ELECTRIC discharges
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 59
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7654168
- Full Text :
- https://doi.org/10.1063/1.336415