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The formation of hydrogen passivated silicon single-crystal surfaces using ultraviolet cleaning and HF etching.

Authors :
Takahagi, T.
Nagai, I.
Ishitani, A.
Kuroda, H.
Nagasawa, Y.
Source :
Journal of Applied Physics. 10/1/1988, Vol. 64 Issue 7, p3516. 6p. 2 Black and White Photographs, 1 Diagram, 2 Charts, 8 Graphs.
Publication Year :
1988

Abstract

Develops a new procedure to prepare the clean surface of a silicon single crystal. Tests which proved that prepared surface has a hydrogen monoatomic layer; Effect of hydrogen termination; Manner of removing the oxide layer in a silicon single-crystal held in the air.

Subjects

Subjects :
*SILICON
*HYDROGEN
*CRYSTALS

Details

Language :
English
ISSN :
00218979
Volume :
64
Issue :
7
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7655685
Full Text :
https://doi.org/10.1063/1.341489