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Precipitation of 3d transition-metal silicides in Czochralski silicon crystals.

Authors :
Wijaranakula, W.
Kim, S. S.
Source :
Journal of Applied Physics. 11/15/1994, Vol. 76 Issue 10, p6017. 3p. 1 Black and White Photograph, 2 Graphs.
Publication Year :
1994

Abstract

Focuses on a study which observed the precipitation of metal silicides in Czochralski silicon crystals contaminated with 3d transition metals. Background on 3d transition-metal silicides; Preparation of the crystals; Description of the crystal's growth.

Subjects

Subjects :
*SILICIDES
*SILICON crystals
*TRANSITION metals

Details

Language :
English
ISSN :
00218979
Volume :
76
Issue :
10
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7663229
Full Text :
https://doi.org/10.1063/1.358355
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