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Orientation of Bi4Ti3O12-based ferroelectric thin films prepared on various kinds of substrates by metalorganic chemical vapor deposition
- Source :
-
Journal of Crystal Growth . Feb2002, Vol. 235 Issue 1-4, p389. 5p. - Publication Year :
- 2002
-
Abstract
- La- and V-substituted thin films of Bi4Ti3O12 (Bi3.25,La0.75)(Ti2.97,V0.03)O12 (BLTV) were prepared by metalorganic chemical vapor deposition on (1 1 1)Ir/TiO2/SiO2/Si, (1 1 1)Pt/TiO2/SiO2/Si, and (1 1 1)Pt/Ti/SiO2/Si substrates at 600°C. Film orientation was investigated by X-ray reciprocal space mapping together with the conventional X-ray 2θ–θ scan. All the films consisted of a single phase of BLTV and showed mainly (0 0 1)- and (1 1 7)-orientations on a 2θ–θ scan. However, it was confirmed that the weak (1 1 7)-, strong (1 0 4)-, and (1 1 1)-centered orientations; (1 1 0), (1 1 1), and (1 1 2) orientations, were ascertained for the films deposited on (1 1 1)Pt/TiO2/SiO2/Si, (1 1 1)Pt/Ti/SiO2/Si, and (1 1 1)Ir/TiO2/SiO2/Si substrates, respectively, by the X-ray reciprocal space-mapping measurement. These tendencies were in response to the ferroelectric property of the film. As a result, orientation of the film strongly depended on the kinds of substrates and the X-ray reciprocal space mapping is the useful method to investigate the orientation of the bismuth-layer-structured ferroelectric thin films. [Copyright &y& Elsevier]
- Subjects :
- *THIN films
*X-ray diffraction
*METAL organic chemical vapor deposition
Subjects
Details
- Language :
- English
- ISSN :
- 00220248
- Volume :
- 235
- Issue :
- 1-4
- Database :
- Academic Search Index
- Journal :
- Journal of Crystal Growth
- Publication Type :
- Academic Journal
- Accession number :
- 7744996
- Full Text :
- https://doi.org/10.1016/S0022-0248(01)01917-0