Fabrication of the thin film slot antenna arrays for receiving 28 THz-CO<F>2</F> laser radiation

Thin film parasitic slot antenna arrays with 0.1-μm-width DC cuts were fabricated using a microfabrication technique, and the receiving properties were investigated at 28 THz in order to expand the operating frequency and to improve the power gain. The experimental results indicate that the fabricated antenna arrays operate as expected from the theory based on the transmission line model, and the power gain improved by 6 dB compared to the single slot antenna when fabricating the 7-parasitic slot antenna array. [Copyright &y& Elsevier]