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Investigation of fabrication and resonant optical coupling in various 2D micro-resonator structures in a UV 210 polymer.
- Source :
-
Journal of Micromechanics & Microengineering . Aug2012, Vol. 22 Issue 8, p1-8. 8p. - Publication Year :
- 2012
-
Abstract
- In this paper, we report on the design and the overall realization of micro-resonators based on the development of adequate processes on a UV210 polymer. These micro-optical structures are developed by deep ultraviolet lithography allowing fabrication of nano-structured devices by means of low cost and reproducible processes. Two families of resonant micro-structures shaped on disk and stadium with various sizes are investigated. Structural and optical imaging characterizations have been carried out to ensure their ability to act as resonant integrated micro-structures. At first, scanning electron microscopy and Nomarsky microscopy studies confirm the UV-light process resolution down to 450 nm developed on a UV210 polymer. Then, optical characterizations have been performed as regards intensity and spectral properties of such micro-resonators. Field intensity measurements in visible and infrared ranges have been realized and validate light propagation by evanescent coupling between waveguides and micro-resonators. Finally, spectral analyses on TE modes demonstrate the presence of optical resonances with 1.45 nm and 2.19 nm free spectral range values for respectively disk and stadium micro-structures. The UV210 polymer appears appropriate for the realization of micro-structures requiring a few hundred nanometers gap-scale while maintaining adequate spectral properties for versatile applications in telecommunication and metrology [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 13616439
- Volume :
- 22
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Journal of Micromechanics & Microengineering
- Publication Type :
- Academic Journal
- Accession number :
- 78192047
- Full Text :
- https://doi.org/10.1088/0960-1317/22/8/085016