Effect of Surface Functionalizationof Metal Wireon Electrophysical Properties of Inductive Elements.

The development of the microelectronics industry requiresa newelement basis with reduced size and increased functionality. The mostimportant components in modern microelectronic integrated circuitsare passive elements. One of the key challenges in order to improvethe functionality of integrated circuits is to increase the qualityof passive elements composing them. In this paper we suggest a novelapproach to increase the quality factor Q of inductors by the surfacemodification and functionalization of the metal components. Ultrasoundinduced surface modification of metal wires led to the formation ofa porous surface structure, which further can be functionalized withmagnetite nanoparticles using layer-by-layer assembly technique. Thesurface modification and deposition of magnetite nanoparticles wasinvestigated with SEM, XRD, and contact angle measurements. Additionally,inductance and resistance measurements, as the main parameters determiningthe Q-factor of inductors, were carried out. Samples with high numberof magnetic nanoparticle–polyelectrolyte bilayers demonstratea significant increase in inductance and a slight decrease in resistancein comparison to uncoated ones. The combination of these factors ledto enhancement the Q-factor of the investigated inductive elements. [ABSTRACT FROM AUTHOR]