Development of a 915 MHz ECR plasma source

MLA

Kawai, Yoshinobu, et al. “Development of a 915 MHz ECR Plasma Source.” Vacuum, vol. 87, Jan. 2013, pp. 123–27. EBSCOhost, https://doi.org/10.1016/j.vacuum.2012.03.016.

APA

Kawai, Y., Uchino, K., Muta, H., & Röwf, T. (2013). Development of a 915 MHz ECR plasma source. Vacuum, 87, 123–127. https://doi.org/10.1016/j.vacuum.2012.03.016

Chicago

Kawai, Yoshinobu, Kiichiro Uchino, Hiroshi Muta, and Tobias Röwf. 2013. “Development of a 915 MHz ECR Plasma Source.” Vacuum 87 (January): 123–27. doi:10.1016/j.vacuum.2012.03.016.