Modeling of a 4DOF precise positioning stage by finite element method.

This paper proposes a novel 4DOF precise positioning stage on the rotational platform for the calibration of the rotary encoder's raster scales. The 4DOF precise positioning stage is featured with flexure-based joints and mechanical actuation mechanisms. The flexure-based joints for required motion were optimised. Their performances in terms of maximum and minimum output displacements, maximum stress and resonant frequency have been evaluated via finite element analysis approach, using SolidWorks Simulation software package. [ABSTRACT FROM AUTHOR]