Cite
Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering
MLA
Meng, Xiangqin, et al. “Preparation of Highly C-Axis Oriented AlN Films on Si Substrate with ZnO Buffer Layer by the DC Magnetron Sputtering.” Materials Letters, vol. 90, Jan. 2013, pp. 49–52. EBSCOhost, https://doi.org/10.1016/j.matlet.2012.09.010.
APA
Meng, X., Yang, C., Chen, Q., Gao, Y., & Yang, J. (2013). Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering. Materials Letters, 90, 49–52. https://doi.org/10.1016/j.matlet.2012.09.010
Chicago
Meng, Xiangqin, Chengtao Yang, Qingqing Chen, Yang Gao, and Jiancang Yang. 2013. “Preparation of Highly C-Axis Oriented AlN Films on Si Substrate with ZnO Buffer Layer by the DC Magnetron Sputtering.” Materials Letters 90 (January): 49–52. doi:10.1016/j.matlet.2012.09.010.