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Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth
- Source :
-
Review of Scientific Instruments . Apr98, Vol. 69 Issue 4, p1800. 11p. 1 Diagram, 13 Graphs. - Publication Year :
- 1998
-
Abstract
- Develops a multichannel spectroscopic ellipsometer based on the rotation-compensator principle. Application of thin film growth for real time Stoke vector spectroscopy; Advantage of the ellipsometer design over the rotating-polarizer design; Characterization of the time evolution of light scattering.
- Subjects :
- *ELLIPSOMETRY
*LIGHT scattering
Subjects
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 69
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 835694
- Full Text :
- https://doi.org/10.1063/1.1148844