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High sensitive dielectric filled Lamé mode mass sensor
- Source :
-
Sensors & Actuators A: Physical . Dec2012, Vol. 188, p82-88. 7p. - Publication Year :
- 2012
-
Abstract
- Abstract: A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81MHz, mass sensitivity of 105.4μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 09244247
- Volume :
- 188
- Database :
- Academic Search Index
- Journal :
- Sensors & Actuators A: Physical
- Publication Type :
- Academic Journal
- Accession number :
- 83652906
- Full Text :
- https://doi.org/10.1016/j.sna.2012.03.040