Cite
A novel checker-patterned AlN MEMS resonator as gravimetric sensor
MLA
Heidari, Amir, et al. “A Novel Checker-Patterned AlN MEMS Resonator as Gravimetric Sensor.” Sensors & Actuators A: Physical, vol. 189, Jan. 2013, pp. 298–306. EBSCOhost, https://doi.org/10.1016/j.sna.2012.09.027.
APA
Heidari, A., Yoon, Y.-J., Lee, M. I., Khine, L., Park, M. K., & Tsai, J. M. L. (2013). A novel checker-patterned AlN MEMS resonator as gravimetric sensor. Sensors & Actuators A: Physical, 189, 298–306. https://doi.org/10.1016/j.sna.2012.09.027
Chicago
Heidari, Amir, Yong-Jin Yoon, Man I Lee, Lynn Khine, Mi Kyoung Park, and Julius Ming Lin Tsai. 2013. “A Novel Checker-Patterned AlN MEMS Resonator as Gravimetric Sensor.” Sensors & Actuators A: Physical 189 (January): 298–306. doi:10.1016/j.sna.2012.09.027.