Cite
Growth stress evolution in HfO2/SiO2 multilayers
MLA
Li, Jingping, et al. “Growth Stress Evolution in HfO2/SiO2 Multilayers.” Thin Solid Films, vol. 526, Dec. 2012, pp. 70–73. EBSCOhost, https://doi.org/10.1016/j.tsf.2012.11.014.
APA
Li, J., Fang, M., He, H., Shao, J., Fan, Z., & Li, Z. (2012). Growth stress evolution in HfO2/SiO2 multilayers. Thin Solid Films, 526, 70–73. https://doi.org/10.1016/j.tsf.2012.11.014
Chicago
Li, Jingping, Ming Fang, Hongbo He, Jianda Shao, Zhengxiu Fan, and Zhaoyang Li. 2012. “Growth Stress Evolution in HfO2/SiO2 Multilayers.” Thin Solid Films 526 (December): 70–73. doi:10.1016/j.tsf.2012.11.014.