Cite
Patterned film effects on the adhesion of Al/TiN barrier using fracture-energy based finite element analysis
MLA
Lee, Chang-Chun. “Patterned Film Effects on the Adhesion of Al/TiN Barrier Using Fracture-Energy Based Finite Element Analysis.” Surface & Coatings Technology, vol. 215, Jan. 2013, pp. 400–06. EBSCOhost, https://doi.org/10.1016/j.surfcoat.2012.08.088.
APA
Lee, C.-C. (2013). Patterned film effects on the adhesion of Al/TiN barrier using fracture-energy based finite element analysis. Surface & Coatings Technology, 215, 400–406. https://doi.org/10.1016/j.surfcoat.2012.08.088
Chicago
Lee, Chang-Chun. 2013. “Patterned Film Effects on the Adhesion of Al/TiN Barrier Using Fracture-Energy Based Finite Element Analysis.” Surface & Coatings Technology 215 (January): 400–406. doi:10.1016/j.surfcoat.2012.08.088.