Cite
Preparation of the c-axis oriented AlN film by laser chemical vapor deposition using a newly proposed Al(acac)3 precursor
MLA
You, Yu, et al. “Preparation of the C-Axis Oriented AlN Film by Laser Chemical Vapor Deposition Using a Newly Proposed Al(Acac)3 Precursor.” Journal of Crystal Growth, vol. 365, Feb. 2013, pp. 1–5. EBSCOhost, https://doi.org/10.1016/j.jcrysgro.2012.12.034.
APA
You, Y., Ito, A., Tu, R., & Goto, T. (2013). Preparation of the c-axis oriented AlN film by laser chemical vapor deposition using a newly proposed Al(acac)3 precursor. Journal of Crystal Growth, 365, 1–5. https://doi.org/10.1016/j.jcrysgro.2012.12.034
Chicago
You, Yu, Akihiko Ito, Rong Tu, and Takashi Goto. 2013. “Preparation of the C-Axis Oriented AlN Film by Laser Chemical Vapor Deposition Using a Newly Proposed Al(Acac)3 Precursor.” Journal of Crystal Growth 365 (February): 1–5. doi:10.1016/j.jcrysgro.2012.12.034.