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Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping.
- Source :
-
Applied Physics Letters . 2/18/2013, Vol. 102 Issue 7, p071901-071901-4. 1p. 1 Black and White Photograph, 1 Chart, 3 Graphs. - Publication Year :
- 2013
-
Abstract
- Thin-film microcrystalline diamond micromechanical resonators with mechanical quality factor limited by thermoelastic dissipation in the diamond film are demonstrated. Surface micromachined double ended tuning fork resonators were fabricated from in-situ boron doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. Time-domain thermoreflectance measurements show thermal conductivity of 110 W m-1 K-1 for heat transport through the thickness of the diamond film. Measurement of the quality factor of resonators spanning a frequency range 0.5-10 MHz shows a maximum Q = 81 646 and demonstrates good agreement with quality factor limited by thermoelastic dissipation using 100 W m-1 K-1 for the in-plane thermal conductivity of the diamond film. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 102
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 85738573
- Full Text :
- https://doi.org/10.1063/1.4793234