Cite
Reaction kinetics in silicon chemical vapor deposition
MLA
Tonokura, Kenichi, and Mitsuo Koshi. “Reaction Kinetics in Silicon Chemical Vapor Deposition.” Current Opinion in Solid State & Materials Science, vol. 6, no. 5, Oct. 2002, p. 479. EBSCOhost, https://doi.org/10.1016/S1359-0286(02)00078-5.
APA
Tonokura, K., & Koshi, M. (2002). Reaction kinetics in silicon chemical vapor deposition. Current Opinion in Solid State & Materials Science, 6(5), 479. https://doi.org/10.1016/S1359-0286(02)00078-5
Chicago
Tonokura, Kenichi, and Mitsuo Koshi. 2002. “Reaction Kinetics in Silicon Chemical Vapor Deposition.” Current Opinion in Solid State & Materials Science 6 (5): 479. doi:10.1016/S1359-0286(02)00078-5.