Back to Search
Start Over
Influence of the substrate bias on the stoichiometry and structure of RF-magnetron sputter-deposited silver-containing calcium phosphate coatings.
- Source :
-
Materialwissenschaft und Werkstoffechnik . Mar2013, Vol. 44 Issue 2/3, p218-225. 8p. - Publication Year :
- 2013
-
Abstract
- A coating on the basis of silver-containing hydroxyapatite (silver-hydroxyapatite) was deposited by radio frequency (RF) magnetron sputtering. X-ray diffractometry, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and ellipsometry were used to analyse the change in structure and stoichiometry of the coatings upon the change of the negative electrical bias (-50 V and -100 V) on the substrate. The chemical composition of the sputter-deposited coating was identical to the target. However, an increase in the negative electrical bias on the substrate led to a decrease of the coating thickness. In addition, the average size of the grains decreased from 55 ± 15 nm (grounded substrate) up to 30 ± 10 nm when an electrical bias of -100 V was applied. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09335137
- Volume :
- 44
- Issue :
- 2/3
- Database :
- Academic Search Index
- Journal :
- Materialwissenschaft und Werkstoffechnik
- Publication Type :
- Academic Journal
- Accession number :
- 86053933
- Full Text :
- https://doi.org/10.1002/mawe.201300101